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公开(公告)号：US09705082B2
公开(公告)日：2017-07-11
申请号：US14883989
申请日：2015-10-15
Applicant: Samsung Display Co., Ltd.
Inventor： Sangshin Lee , Dongjin Ha , Mingoo Kang , Ohseob Kwon , Sangmin Yi
CPC classification number: H01L51/0011 , H01L27/3211 , H01L27/3223 , H01L51/5012 , H01L51/5088 , H01L51/56
Abstract: A method for pixel patterning and pixel position inspection of an organic light-emitting display device includes: forming, on a substrate using a first mask, a thin film layer of a first color corresponding to a first pixel pattern and a first pixel positioning pattern for inspecting a position of a first pixel; shifting, by a determined pitch, the first mask from a position associated with forming the thin film layer of the first color; aligning the shifted first mask with respect to the substrate; and forming, on the substrate using the shifted first mask, a thin film layer of a second color corresponding to the first pixel pattern and another first pixel positioning pattern for inspecting a position of a second pixel.
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2.发明授权Mask assembly for deposition, deposition apparatus, and method employing the same 有权用于沉积的掩模组件，沉积装置和使用其的方法公开(公告)号：US09530961B2
公开(公告)日：2016-12-27
申请号：US14697925
申请日：2015-04-28
Applicant: Samsung Display Co., Ltd.
Inventor： Sangmin Yi , Mingoo Kang , Minchul Song , Sangshin Lee , Sangyun Lee
CPC classification number: H01L51/0002 , C23C14/042 , H01L51/0011 , H01L51/56
Abstract: Disclosed is a mask assembly for deposition including: a frame having an opening; a mask having at least one pattern part formed in a second direction that is different from a first direction, wherein at least a portion of the mask is supported by the frame and the at least one pattern part has one or more slits continuously formed in the first direction; and at least one support stick extending in the second direction across the opening so as to support at least a portion of the mask.
Abstract translation: 公开了一种用于沉积的掩模组件，包括：具有开口的框架; 具有沿与第一方向不同的第二方向形成的至少一个图案部的掩模，其中，所述掩模的至少一部分由所述框架支撑，所述至少一个图案部具有连续形成在所述第一方向上的一个或多个狭缝 第一方向 以及至少一个支撑杆，沿着所述第二方向延伸穿过所述开口以便支撑所述掩模的至少一部分。
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公开(公告)号：US10224482B2
公开(公告)日：2019-03-05
申请号：US15630877
申请日：2017-06-22
Applicant: Samsung Display Co., Ltd.
Inventor： Sangshin Lee , Dongjin Ha , Mingoo Kang , Ohseob Kwon , Sangmin Yi
Abstract: A method for pixel patterning and pixel position inspection of an organic light-emitting display device includes: forming, on a substrate using a first mask, a thin film layer of a first color corresponding to a first pixel pattern and a first pixel positioning pattern for inspecting a position of a first pixel; shifting, by a determined pitch, the first mask from a position associated with forming the thin film layer of the first color; aligning the shifted first mask with respect to the substrate; and forming, on the substrate using the shifted first mask, a thin film layer of a second color corresponding to the first pixel pattern and another first pixel positioning pattern for inspecting a position of a second pixel.
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Patent Agency Ranking
公开(公告)号：US10883164B2
公开(公告)日：2021-01-05
申请号：US15632453
申请日：2017-06-26
Applicant: Samsung Display Co., Ltd.
Inventor： Mingoo Kang , Jongbum Kim
Abstract: A mask frame assembly includes: a mask including a deposition pattern through which a deposition material is deposited to a deposition target; a frame to which the mask comprising the deposition pattern is combined; and a pattern position adjusting mechanism which is coupled to the frame and configured to apply a force to the frame such that a position of the deposition pattern of the mask combined to the frame is changed.
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公开(公告)号：US20180023183A1
公开(公告)日：2018-01-25
申请号：US15632453
申请日：2017-06-26
Applicant: Samsung Display Co., Ltd.
Inventor： Mingoo Kang , Jongbum Kim
CPC classification number: C23C14/042 , H01L51/0011 , H05K3/1225 , H05K3/146 , H05K2201/10128 , H05K2203/0169
Abstract: A mask frame assembly includes: a mask including a deposition pattern through which a deposition material is deposited to a deposition target; a frame to which the mask comprising the deposition pattern is combined; and a pattern position adjusting mechanism which is coupled to the frame and configured to apply a force to the frame such that a position of the deposition pattern of the mask combined to the frame is changed.
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公开(公告)号：US10916703B2
公开(公告)日：2021-02-09
申请号：US16792581
申请日：2020-02-17
Applicant: Samsung Display Co., Ltd.
Inventor： Sangshin Lee , Dongjin Ha , Mingoo Kang , Ohseob Kwon , Sangmin Yi
Abstract: A method for pixel patterning and pixel position inspection of an organic light-emitting display device includes: forming, on a substrate using a first mask, a thin film layer of a first color corresponding to a first pixel pattern and a first pixel positioning pattern for inspecting a position of a first pixel; shifting, by a determined pitch, the first mask from a position associated with forming the thin film layer of the first color; aligning the shifted first mask with respect to the substrate; and forming, on the substrate using the shifted first mask, a thin film layer of a second color corresponding to the first pixel pattern and another first pixel positioning pattern for inspecting a position of a second pixel.
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公开(公告)号：US10566533B2
公开(公告)日：2020-02-18
申请号：US16292288
申请日：2019-03-04
Applicant: Samsung Display Co., Ltd.
Inventor： Sangshin Lee , Dongjin Ha , Mingoo Kang , Ohseob Kwon , Sangmin Yi
Abstract: A method for pixel patterning and pixel position inspection of an organic light-emitting display device includes: forming, on a substrate using a first mask, a thin film layer of a first color corresponding to a first pixel pattern and a first pixel positioning pattern for inspecting a position of a first pixel; shifting, by a determined pitch, the first mask from a position associated with forming the thin film layer of the first color; aligning the shifted first mask with respect to the substrate; and forming, on the substrate using the shifted first mask, a thin film layer of a second color corresponding to the first pixel pattern and another first pixel positioning pattern for inspecting a position of a second pixel.
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公开(公告)号：US20190198764A1
公开(公告)日：2019-06-27
申请号：US16292288
申请日：2019-03-04
Applicant: Samsung Display Co., Ltd.
Inventor： Sangshin Lee , Dongjin Ha , Mingoo Kang , Ohseob Kwon , Sangmin Yi
CPC classification number: H01L51/0011 , H01L27/3211 , H01L27/3223 , H01L51/5012 , H01L51/5088 , H01L51/56
Abstract: A method for pixel patterning and pixel position inspection of an organic light-emitting display device includes: forming, on a substrate using a first mask, a thin film layer of a first color corresponding to a first pixel pattern and a first pixel positioning pattern for inspecting a position of a first pixel; shifting, by a determined pitch, the first mask from a position associated with forming the thin film layer of the first color; aligning the shifted first mask with respect to the substrate; and forming, on the substrate using the shifted first mask, a thin film layer of a second color corresponding to the first pixel pattern and another first pixel positioning pattern for inspecting a position of a second pixel.
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