公开(公告)号：US20230201962A1

公开(公告)日：2023-06-29

申请号：US18071041

申请日：2022-11-29

Applicant: Samsung Display Co., Ltd.

Inventor： ALEXANDER VORONOV ,  HYUNGSIK KIM ,  JUNGHWA YOU ,  WOOHYUN JUNG ,  KYUNGHAN YOO

IPC: B23K26/067 ,  B23K26/06 ,  B23K26/0622

CPC classification number: B23K26/0676 ,  B23K26/0652 ,  B23K26/0648 ,  B23K26/0624 ,  B23K2101/36

Abstract: A laser machining device includes: a broadband light source, which generates a broadband laser beam; a first lens unit to which the broadband laser beam is incident and having a first effective focal length; a second lens unit spaced apart from the first lens unit in a first direction and having a second effective focal length; a beam splitter disposed between the first lens unit and the second lens unit, and which is movable in the first direction and a direction opposite to the first direction within the first effective focal length from the first lens unit, and splits the broadband laser beam passing through the first lens unit into a plurality of sub-laser beams; and a focusing lens spaced apart from the second lens unit in the first direction, and which focuses the sub-laser beams passing through the second lens unit on a substrate.