DEPOSITION APPARATUS CAPABLE OF MEASURING RESIDUAL AMOUNT OF DEPOSITION MATERIAL AND METHOD OF MEASURING THE RESIDUAL AMOUNT OF THE DEPOSITION MATERIAL USING THE DEPOSITION APPARATUS
    3.
    发明申请
    DEPOSITION APPARATUS CAPABLE OF MEASURING RESIDUAL AMOUNT OF DEPOSITION MATERIAL AND METHOD OF MEASURING THE RESIDUAL AMOUNT OF THE DEPOSITION MATERIAL USING THE DEPOSITION APPARATUS 审中-公开
    测定沉积物残留量的沉积装置及使用沉积装置测定沉积物残留量的方法

    公开(公告)号:US20140044863A1

    公开(公告)日:2014-02-13

    申请号:US13766263

    申请日:2013-02-13

    Inventor: Jung-Wook Kim

    CPC classification number: C23C16/52 C23C14/52

    Abstract: A deposition apparatus includes a process chamber including an observing window, a crucible disposed in the process chamber to overlap with the observing window in a first direction, a disc disposed between the observing window and the crucible to overlap with the observing window in the first direction and rotated with respect to the first direction, a rotation unit coupled to the process chamber and the disc to rotate the disc, a deposition preventing plate disposed between the disc and the crucible and provided with an opening formed therethrough and overlapped with the observing window in the first direction, and a measuring sensor disposed outside the process chamber to overlap with the observing window, the disc, and the crucible in the first direction. The measuring sensor senses a distance between the deposition material and the measuring sensor to measure a residual amount of the deposition material.

    Abstract translation: 沉积装置包括:处理室,包括观察窗,设置在处理室中的与第一方向的观察窗重叠的坩埚,设置在观察窗和坩埚之间的盘,以与观察窗在第一方向重叠 并相对于第一方向旋转;旋转单元,其联接到处理室和盘以旋转盘;防沉积板,设置在盘和坩埚之间,并且设置有穿过其中并与观察窗重叠的开口 所述第一方向和设置在所述处理室外部的测量传感器,以与所述观察窗,所述盘和所述坩埚沿所述第一方向重叠。 测量传感器感测沉积材料和测量传感器之间的距离,以测量沉积材料的残留量。

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