公开(公告)号：US11624108B2

公开(公告)日：2023-04-11

申请号：US15663318

申请日：2017-07-28

Applicant: Samsung Display Co., Ltd.

Inventor： Jae Suk Moon ,  Young Eun Ryu ,  Soo Hyun Min ,  Taek Kyo Kang ,  Min Ju Kim

IPC: C23C14/04 ,  C23C14/24 ,  H01L51/56 ,  H01L51/00

Abstract: A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.

公开(公告)号：US11207705B2

公开(公告)日：2021-12-28

申请号：US16817325

申请日：2020-03-12

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Su Cheol Gong ,  Min Goo Kang ,  Taek Kyo Kang ,  Jung Woo Ko ,  Min Ju Kim ,  Young Eun Ryu ,  Jae Suk Moon ,  Soo Hyun Min

IPC: B05B12/20 ,  B05C21/00 ,  B23K31/02 ,  C23C14/04 ,  B23K103/04 ,  H01L51/00 ,  H01L51/56

Abstract: A mask and a method of manufacturing a mask assembly, the mask including a body, and the body including one end and another end facing each other in a length direction and having a first surface and a second surface facing each other in a thickness direction; and a pattern region between the one end and the other end, the pattern region including a plurality of pattern holes and a plurality of ribs between the plurality of pattern holes, wherein a curl value of the mask, which is defined as a shortest distance from a plane tangent to a center of the body to the one end or the other end of the body, is 1,000 μm to 4,000 μm.