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公开(公告)号：US20210364769A1
公开(公告)日：2021-11-25
申请号：US17239732
申请日：2021-04-26
Applicant: Samsung Display Co., Ltd.
Inventor： Emil ASLANOV , JONGKI KIM , YOONGYEONG BAE , GYOOWAN HAN
Abstract: A laser device includes a light source generating a laser beam, a stage, and a lens assembly disposed between the light source and the stage and irradiating the laser beam to a substrate disposed on the stage. The lens assembly includes a first lens assembly making divergent the laser beam provided from the light source, a deflector changing a path of the laser beam provided from the first lens assembly, and a second lens assembly condensing the laser beam provided from the deflector and irradiating the condensed laser beam to the substrate.
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