公开(公告)号：US20180161825A1

公开(公告)日：2018-06-14

申请号：US15828202

申请日：2017-11-30

Applicant: Samsung Display Co., Ltd.

Inventor： JINSEOK SON ,  MYUNGKYU KIM ,  KYUNGHOON CHUNG

IPC: B08B3/02 ,  B08B7/00 ,  B08B3/08 ,  B08B7/04

CPC classification number: B08B3/024 ,  B08B3/08 ,  B08B7/0042 ,  B08B7/0057 ,  B08B7/04 ,  C23C14/042 ,  H01L51/0011 ,  H01L51/5287 ,  H01L51/56 ,  H05B33/10

Abstract: A mask cleaning apparatus and method of using the same includes a preheating zone preheating a mask, a first ultraviolet cleaning zone irradiating the mask with a first ultraviolet laser beam at a first irradiation angle, a first cooling zone cooling the mask irradiated with the first ultraviolet laser beam, a second ultraviolet cleaning zone irradiating the mask with a second ultraviolet laser beam at a second irradiation angle, a second cooling zone cooling the mask irradiated with the second ultraviolet laser beam, an infrared cleaning zone irradiating the mask with an infrared laser beam at a third irradiation angle, and a peeling zone spraying air onto the mask irradiated with the infrared laser beam.