公开(公告)号：US20230307224A1

公开(公告)日：2023-09-28

申请号：US18123206

申请日：2023-03-17

Applicant: Samsung Display Co., Ltd.

Inventor： SUNGJIN KIM ,  CHUNYOUNG PARK ,  JAEMORK PARK ,  WONSEOK CHO

IPC: H01L21/02 ,  H10K71/16

CPC classification number: H01L21/02057 ,  H10K71/164

Abstract: A particle collecting device includes: a first collecting device to be located on a substrate transferred in a first direction, and extending in a second direction crossing the first direction; and a second collecting device adjacent to the first collecting device in the first direction, the second collecting device to be located on the substrate, and extending in the second direction. The first collecting device is to collect a first particle remaining on the substrate, and the second collecting device is to collect a second particle remaining on the substrate, the second particle including a material different from that of the first particle.