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公开(公告)号：US20220267888A1
公开(公告)日：2022-08-25
申请号：US17742355
申请日：2022-05-11
Applicant: Samsung Display Co., Ltd.
Inventor： Hwi KIM , In Bae KIM , Sung Soon IM , Kyu Hwan HWANG
Abstract: A method of manufacturing a deposition mask includes preparing a mask-target substrate which has one surface on which a sacrificed layer pattern is formed and comprises a cover area covered by the sacrificed layer pattern and a plurality of exposed areas exposed by the sacrificed layer pattern; forming holes in the exposed areas of the mask-target substrate by emitting laser toward the mask-target substrate; and removing the sacrificed layer pattern, wherein the sacrificed layer pattern has a higher reflectance with respect to the laser than a reflectance of the mask-target substrate.
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公开(公告)号：US20200208249A1
公开(公告)日：2020-07-02
申请号：US16674997
申请日：2019-11-05
Applicant: Samsung Display Co., Ltd.
Inventor： Hwi KIM , In Bae KIM , Sung Soon IM , Kyu Hwan HWANG
Abstract: A method of manufacturing a deposition mask includes preparing a mask-target substrate which has one surface on which a sacrificed layer pattern is formed and comprises a cover area covered by the sacrificed layer pattern and a plurality of exposed areas exposed by the sacrificed layer pattern; forming holes in the exposed areas of the mask-target substrate by emitting laser toward the mask-target substrate; and removing the sacrificed layer pattern, wherein the sacrificed layer pattern has a higher reflectance with respect to the laser than a reflectance of the mask-target substrate.
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