公开(公告)号：US20240026518A1

公开(公告)日：2024-01-25

申请号：US18296490

申请日：2023-04-06

Applicant: Samsung Display Co., Ltd.

Inventor： Dongwook Kim ,  Kwangho Park ,  Eugene Kang ,  Younghun Park ,  Seungjoo Baek ,  Dongyun Shin ,  Hyunwoo Jang ,  Jonghyun Jung

IPC: C23C14/04 ,  H10K71/16

CPC classification number: C23C14/042 ,  H10K71/166

Abstract: An apparatus for manufacturing a display device includes a mask assembly, and a deposition source including a deposition part that supplies deposition material to the mask assembly. The deposition part includes a deposition frame including an inner space, a crucible disposed in the inner space of the deposition frame to be withdrawn from the deposition frame and accommodating the deposition material, a nozzle connected to the crucible and that sprays the deposition material accommodated in the crucible, a first heating portion disposed in the inner space of the deposition frame and that heats the deposition material accommodated in the crucible, and a second heating portion being movable between a first position at which the nozzle is heated and a second position at which a withdrawal space so that the crucible is withdrawn from the deposition frame.