公开(公告)号：US20170098567A1

公开(公告)日：2017-04-06

申请号：US15178427

申请日：2016-06-09

Applicant: Samsung Display Co., Ltd.

Inventor： Su-Kyoung Yang ,  Gyung-Min Baek ,  Yoon-Yong Park ,  Chang-Oh Jeong

IPC: H01L21/683 ,  C23C14/50 ,  C23C16/458

CPC classification number: H01L21/6833 ,  C23C14/50 ,  C23C16/4586

Abstract: An electrostatic chuck and a substrate processing apparatus including the same are disclosed. In one aspect, the electrostatic chuck includes a stage configured to support a substrate including a panel formation region and a dummy region surrounding the panel formation region. The electrostatic chuck includes a substrate fixing unit including a plurality of electrode patterns insulated from the substrate and spaced apart from one another, the substrate fixing unit at least partially overlapping the dummy region of the substrate and not overlapping the panel formation region of the substrate.

公开(公告)号：US10403536B2

公开(公告)日：2019-09-03

申请号：US15178427

申请日：2016-06-09

Applicant: Samsung Display Co., Ltd.

Inventor： Su-Kyoung Yang ,  Gyung-Min Baek ,  Joon-Yong Park ,  Chang-Oh Jeong

IPC: H01L21/683 ,  C23C14/50 ,  C23C16/458

Abstract: An electrostatic chuck and a substrate processing apparatus including the same are disclosed. In one aspect, the electrostatic chuck includes a stage configured to support a substrate including a panel formation region and a dummy region surrounding the panel formation region. The electrostatic chuck includes a substrate fixing unit including a plurality of electrode patterns insulated from the substrate and spaced apart from one another, the substrate fixing unit at least partially overlapping the dummy region of the substrate and not overlapping the panel formation region of the substrate.