公开(公告)号：US20240318299A1

公开(公告)日：2024-09-26

申请号：US18611480

申请日：2024-03-20

Applicant: Samsung Display Co., Ltd.

Inventor： Eunseok Song ,  Taeho Kim

IPC: C23C14/04 ,  C23C14/26 ,  H10K71/16

CPC classification number: C23C14/042 ,  C23C14/26 ,  H10K71/166

Abstract: A deposition source and an apparatus for manufacturing a display apparatus are provided. A deposition source includes a housing accommodating a deposition material therein, a nozzle connected to the housing, the nozzle for spraying the deposition material accommodated in the housing, a heating portion adjacent to the housing, the heating portion for heating the deposition material accommodated in the housing, and a Peltier plate covering a surface of the housing in which the nozzle is arranged.