公开(公告)号：US20230407461A1

公开(公告)日：2023-12-21

申请号：US18296093

申请日：2023-04-05

Applicant: Samsung Display Co., Ltd.

Inventor： Jeongkuk KIM ,  Youngmin MOON ,  Seungyong SONG ,  Eunbee JO

IPC: C23C16/04

CPC classification number: C23C16/042 ,  H10K59/10

Abstract: A method of repairing a mask includes providing a mask including a mother member, a plurality of first openings, and an over-processed opening adjacent to one of the plurality of first openings and having a size different from a size of each of the plurality of first openings, each of the plurality of first openings and the over-processed opening defined on the mother member, forming a supplement portion in at least a portion of the over-processed opening by irradiating a first laser beam to an area surrounding the over-processed opening of the mother member, and forming a plurality of second openings spaced apart from each other on the mother member by irradiating a second laser beam to the supplement portion.