公开(公告)号：US20230292482A1

公开(公告)日：2023-09-14

申请号：US18174513

申请日：2023-02-24

Applicant: Samsung Display Co., Ltd.

Inventor： MYUNGKYU KIM ,  KYONGHO HONG ,  CHANG-KON PARK ,  SUKBEOM YOU ,  DONGJAE LEE

IPC: H05K13/08 ,  H05K13/00

CPC classification number: H05K13/0812 ,  H05K13/0015

Abstract: A mapping device includes: a substrate engraved with an alignment pattern; an electrostatic chuck under the substrate and in contact with the substrate; and an anti-separation frame on the substrate and preventing the substrate from being separated.

公开(公告)号：US20240076771A1

公开(公告)日：2024-03-07

申请号：US18321376

申请日：2023-05-22

Applicant: Samsung Display Co., Ltd.

Inventor： KYONGHO HONG ,  MYUNGKYU KIM ,  SUNGHO PARK ,  CHANG-KON PARK ,  SUKBEOM YOU ,  DONGJAE LEE

IPC: C23C14/04 ,  C23C14/24

CPC classification number: C23C14/042 ,  C23C14/24 ,  H10K59/1201

Abstract: A mask stage includes a stage inclined with respect to a vertical direction perpendicular to a plane defined by a first direction and a second direction intersecting each other, a plurality of first support units disposed between the stage and a mask frame disposed above the stage, and a plurality of second support units disposed on the stage and being adjacent to a lower side of the mask frame. The lower side of the mask frame extends in a first direction, and the second support units are respectively disposed under end portions of the lower side of the mask frame, which are opposite to each other in the first direction.