公开(公告)号：US20170077459A1

公开(公告)日：2017-03-16

申请号：US15089289

申请日：2016-04-01

Applicant: Samsung Display Co., Ltd.

Inventor： Wonwoo Choi ,  Seungho Yoon ,  Cheryong Hwang ,  Sangbong Lee

IPC: H01L51/56 ,  H01L51/00 ,  H01L27/32

CPC classification number: H01L51/56 ,  B32B38/10 ,  B32B43/006 ,  H01L21/67092 ,  H01L21/6838 ,  H01L51/003 ,  H01L2251/5338 ,  Y10T156/1132 ,  Y10T156/1168 ,  Y10T156/1944 ,  Y10T156/1978

Abstract: An apparatus for separating a substrate and a method of separating a substrate by using the same are disclosed. In one aspect, the apparatus includes a stage and an adsorber facing the stage and comprising a plurality of vacuum pad portions. An upper surface of the stage includes a first region and a pair of second regions located on opposing sides of the first region, wherein the first region and the second regions are disposed on different planes, and wherein each of the second regions is inclined with respect to the first region.

Abstract translation: 公开了一种用于分离衬底的装置和使用该衬底分离衬底的方法。 在一个方面，该装置包括一个阶段和面向舞台的吸附器，并且包括多个真空垫部分。 台的上表面包括第一区域和位于第一区域的相对侧上的一对第二区域，其中第一区域和第二区域设置在不同的平面上，并且其中每个第二区域相对于 到第一个地区。

公开(公告)号：US09793518B2

公开(公告)日：2017-10-17

申请号：US15089289

申请日：2016-04-01

Applicant: Samsung Display Co., Ltd.

Inventor： Wonwoo Choi ,  Seungho Yoon ,  Cheryong Hwang ,  Sangbong Lee

IPC: B32B38/10 ,  H01L51/56 ,  H01L51/00 ,  H01L21/67 ,  H01L21/683 ,  B32B43/00

CPC classification number: H01L51/56 ,  B32B38/10 ,  B32B43/006 ,  H01L21/67092 ,  H01L21/6838 ,  H01L51/003 ,  H01L2251/5338 ,  Y10T156/1132 ,  Y10T156/1168 ,  Y10T156/1944 ,  Y10T156/1978

Abstract: An apparatus for separating a substrate and a method of separating a substrate by using the same are disclosed. In one aspect, the apparatus includes a stage and an adsorber facing the stage and comprising a plurality of vacuum pad portions. An upper surface of the stage includes a first region and a pair of second regions located on opposing sides of the first region, wherein the first region and the second regions are disposed on different planes, and wherein each of the second regions is inclined with respect to the first region.