公开(公告)号：US20180037982A1

公开(公告)日：2018-02-08

申请号：US15660450

申请日：2017-07-26

Applicant: Samsung Display Co., Ltd.

Inventor： Byounggu AN ,  Jinho OH ,  Changsun YOON ,  Mincheol CHA ,  Eugene KANG

IPC: C23C14/24 ,  C23C14/50

CPC classification number: C23C14/243 ,  B22F2998/10 ,  C22C1/045 ,  C22C1/10 ,  C22C27/04 ,  C23C14/042 ,  C23C14/26 ,  C23C14/50 ,  B22F3/02 ,  B22F3/10 ,  B22F3/17

Abstract: A linear evaporation source includes: a crucible accommodating an evaporation material; a heating unit enclosing the crucible and heating the crucible; and a nozzle unit above the crucible, the nozzle unit including a nozzle plate and at least one nozzle protruding from the nozzle plate. A length of the crucible is about 5 times to about 30 times greater than a width of the crucible. The crucible includes molybdenum (Mo) in an amount of about 95.0 percentage by weight (wt %) to about 99.99 wt % and lanthanum oxide (La2O3) in an amount of about 0.01 wt % to about 5 wt %, with respect to the total weight of the crucible.