公开(公告)号：US20180012914A1

公开(公告)日：2018-01-11

申请号：US15442407

申请日：2017-02-24

Applicant: Samsung Display Co., Ltd

Inventor： Jong-Oh SEO ,  Dong-Min LEE ,  Mee-Jae KANG ,  Sang-Ho JEON

IPC: H01L27/12 ,  G02B27/09

CPC classification number: H01L27/1285 ,  G02B27/0927 ,  G02B27/0955 ,  H01L27/1222

Abstract: A laser crystallization apparatus includes a laser generating module configured to generate a laser beam, an optical module configured to guide the laser beam, an annealing chamber comprising a stage on which a target substrate comprising an amorphous thin film formed therein is disposed, the stage being movable along an X-axis direction and a Y-axis direction, and a tilt refractive lens configured to transform the laser beam having a cross-sectional area of a rectangle shape into a tilted laser beam having a cross-sectional area of a non-rectangular parallelogram shape and to irradiate the tilted laser beam perpendicular to the stage.