公开(公告)号：US11942338B2

公开(公告)日：2024-03-26

申请号：US17348316

申请日：2021-06-15

Applicant: Samsung Display Co., LTD.

Inventor： Jong Jang Park ,  Seok Soon Back ,  Sung Hune Yoo

IPC: H01L21/67 ,  H01L27/12

CPC classification number: H01L21/67109 ,  H01L27/1259

Abstract: An apparatus for manufacturing a display device includes a chamber, a heating member disposed inside the chamber to provide a thermal atmosphere inside the chamber, where the heating member includes a first heater and a second heater facing each other, a height adjustment member including an end disposed between the first heater and the second heater, and a driving unit which drives the end of the height adjustment member to move up or down such that the end of the height adjustment member is located at one of a first height and a second height which are different heights between the first heater and the second heater. Each of the first height and the second height is different from a height of a top surface of the first heater, and different from a height of a bottom surface of the second heater facing the top surface of the first heater.

公开(公告)号：US12211712B2

公开(公告)日：2025-01-28

申请号：US18585352

申请日：2024-02-23

Applicant: Samsung Display Co., LTD.

Inventor： Jong Jang Park ,  Seok Soon Back ,  Sung Hune Yoo

IPC: H01L21/67 ,  H01L27/12

Abstract: An apparatus for manufacturing a display device includes a chamber, a heating member disposed inside the chamber to provide a thermal atmosphere inside the chamber, where the heating member includes a first heater and a second heater facing each other, a height adjustment member including an end disposed between the first heater and the second heater, and a driving unit which drives the end of the height adjustment member to move up or down such that the end of the height adjustment member is located at one of a first height and a second height which are different heights between the first heater and the second heater. Each of the first height and the second height is different from a height of a top surface of the first heater, and different from a height of a bottom surface of the second heater facing the top surface of the first heater.

公开(公告)号：US09519228B2

公开(公告)日：2016-12-13

申请号：US13956559

申请日：2013-08-01

Applicant: Samsung Display Co., Ltd.

Inventor： Sung Hune Yoo

IPC: G03F7/20 ,  H01L21/687

CPC classification number: G03F7/70691 ,  G03F7/707 ,  G03F7/70791 ,  H01L21/68742

Abstract: Provided are a substrate holding apparatus and a method of using the substrate holding apparatus. According to an aspect of the present invention, there is provided a substrate holding apparatus comprising a stage on which a substrate is placed, and at least one lift bar which separates the substrate from the stage by raising the substrate or placing the substrate on the stage by lowering the substrate. The lift bar comprises a body and a head. The head is connected to an end of the body, contacts the substrate, and is formed of a porous material.

Abstract translation: 提供了一种基板保持装置和使用该基板保持装置的方法。 根据本发明的一个方面，提供了一种基板保持装置，其包括放置基板的载物台和至少一个提升杆，其通过升高基板或将基板放置在载物台上而将基板与载物台分离 通过降低基板。 提升杆包括主体和头部。 头部连接到主体的端部，与基底接触，并且由多孔材料形成。

公开(公告)号：US20140293257A1

公开(公告)日：2014-10-02

申请号：US13956559

申请日：2013-08-01

Applicant: Samsung Display Co., Ltd.

Inventor： Sung Hune Yoo

IPC: G03F7/20

CPC classification number: G03F7/70691 ,  G03F7/707 ,  G03F7/70791 ,  H01L21/68742

Abstract: Provided are a substrate holding apparatus and a method of using the substrate holding apparatus. According to an aspect of the present invention, there is provided a substrate holding apparatus comprising a stage on which a substrate is placed, and at least one lift bar which separates the substrate from the stage by raising the substrate or placing the substrate on the stage by lowering the substrate. The lift bar comprises a body and a head. The head is connected to an end of the body, contacts the substrate, and is formed of a porous material.

Abstract translation: 提供了一种基板保持装置和使用该基板保持装置的方法。 根据本发明的一个方面，提供了一种基板保持装置，其包括放置基板的载物台和至少一个提升杆，其通过升高基板或将基板放置在载物台上而将基板与载物台分离 通过降低基板。 提升杆包括主体和头部。 头部连接到主体的端部，与基底接触，并且由多孔材料形成。