公开(公告)号：US11990361B2

公开(公告)日：2024-05-21

申请号：US17365990

申请日：2021-07-01

Applicant: Samsung Display Co., LTD.

Inventor： Hee Sun Jang ,  Tae Hun Kim ,  Do Hwan Kim ,  Jae Han Kim ,  Seung Ho Myoung ,  Dae Young Oh ,  Gyeong Hee Han

IPC: H01L21/683 ,  H10K71/00 ,  H10K50/11 ,  H10K50/844 ,  H10K59/12

CPC classification number: H01L21/6833 ,  H10K71/00 ,  H10K50/11 ,  H10K50/844 ,  H10K59/12 ,  H10K59/1201

Abstract: The chuck for supporting a target substrate for a display device, the chuck includes: a base having a first surface to support an object and a second surface opposite the first surface, the first surface including a first area and a second area; and indentations formed in the second area and recessed from the first area in a thickness direction of the base. The indentations include a first indentation extending in a first direction and a second indentation extending in a second direction intersecting the first direction.

公开(公告)号：US12128503B2

公开(公告)日：2024-10-29

申请号：US18111940

申请日：2023-02-21

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sung Yong Lee ,  Toshinaru Suzuki ,  Seung Ho Myoung ,  Gyeong Hee Han ,  Gyoo Wan Han

IPC: B23K26/38 ,  B23K26/12 ,  B23K26/70 ,  B23K101/40

CPC classification number: B23K26/38 ,  B23K26/1224 ,  B23K26/127 ,  B23K26/706 ,  B23K2101/40

Abstract: A laser apparatus includes: a first vacuum chamber, wherein machining is performed on a target substrate in the first vacuum chamber; a laser facing the first vacuum chamber; a carrier disposed in the first vacuum chamber, wherein the target substrate is seated on the carrier; a chamber window disposed in one surface of the first vacuum chamber, wherein a laser beam emitted by the laser passes through the chamber window; a first protection window positioned between the carrier and the chamber window; a second vacuum chamber disposed at a first side of the first vacuum chamber; and a transfer unit configured to transfer the first protection window to the second vacuum chamber.

公开(公告)号：US11612964B2

公开(公告)日：2023-03-28

申请号：US16862815

申请日：2020-04-30

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sung Yong Lee ,  Toshinaru Suzuki ,  Seung Ho Myoung ,  Gyeong Hee Han ,  Gyoo Wan Han

IPC: B23K26/38 ,  B23K26/70 ,  B23K26/12 ,  B23K101/40

Abstract: A laser apparatus includes: a first vacuum chamber, wherein machining is performed on a target substrate in the first vacuum chamber; a laser facing the first vacuum chamber; a carrier disposed in the first vacuum chamber, wherein the target substrate is seated on the carrier; a chamber window disposed in one surface of the first vacuum chamber, wherein a laser beam emitted by the laser passes through the chamber window; a first protection window positioned between the carrier and the chamber window; a second vacuum chamber disposed at a first side of the first vacuum chamber; and a transfer unit configured to transfer the first protection window to the second vacuum chamber.