LASER INSPECTION SYSTEM AND INSPECTION METHOD USING THE SAME

    公开(公告)号:US20240094135A1

    公开(公告)日:2024-03-21

    申请号:US18223616

    申请日:2023-07-19

    Inventor: SEUNGMIN SONG

    CPC classification number: G01N21/88 G01N21/47 G01N2201/06113

    Abstract: A laser inspection system includes a stage including a top surface parallel to a plane defined by a first direction and a second direction intersecting the first direction, a first laser unit spaced apart from the stage in a third direction perpendicular to the plane, where the first laser unit emits a first laser beam proceeding in a direction parallel to the plane, a second laser unit spaced apart from the first laser unit in the third direction, where the second laser unit emits a second laser beam proceeding in a direction parallel to a proceeding direction of the first laser beam, and an inspection object spaced apart from the first laser unit in the first direction on the top surface of the stage, where the inspection object has a maximum allowable specification and a minimum allowable specification in the third direction from the top surface of the stage.

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