公开(公告)号：US20180345332A1

公开(公告)日：2018-12-06

申请号：US15991305

申请日：2018-05-29

Applicant: Samsung Display Co., Ltd.

Inventor： Myung Kyu KIM ,  Kyung Hoon Chung

IPC: B08B7/00

Abstract: A mask cleaning apparatus includes: a mask holding unit configured to hold a mask; a light source unit configured to irradiate light onto the mask to remove a deposition material accumulated on a surface of the mask; and a material collecting unit configured to collect the deposition material removed from the mask, wherein the material collecting unit includes: a plurality of collecting cases corresponding to kinds of the deposition material; a rotating plate having a suction hole; and a plate driving unit configured to rotate the rotating plate to connect the suction hole to at least one of the collecting cases. Based on the irradiated light, different organic deposition materials may be collected for reuse.

公开(公告)号：US20240347365A1

公开(公告)日：2024-10-17

申请号：US18515267

申请日：2023-11-21

Applicant: Samsung Display Co., LTD.

Inventor： Suk Beom YOU ,  Sung Yong LEE ,  Dong Hyun KIM ,  Myung Kyu KIM

IPC: H01L21/683 ,  H01L21/687

CPC classification number: H01L21/6833 ,  H01L21/68735

Abstract: Provided are an electrostatic chuck, a deposition apparatus including the same, and a display panel fabricated using the same. According to an aspect, there is provided an electrostatic chuck including, a body, and a tension assist device disposed at a border of the body, the tension assist device includes a stepped portion disposed on a side of the body, and an end of the stepped portion is disposed higher than an upper surface of the body.