公开(公告)号：US12288709B2

公开(公告)日：2025-04-29

申请号：US17685298

申请日：2022-03-02

Applicant: Samsung Display Co., LTD. ,  ULVAC, INC.

Inventor： Kyung Hoon Chung ,  Masao Nishiguchi ,  Daisuke Iwase ,  Ki Jun Roh ,  Man Soo Jang

IPC: H01L21/67 ,  H01L21/677

Abstract: A vacuum processing apparatus including: a plurality of transport chambers arranged in order along a first direction; a plurality of process chambers connected to the transport chambers along a second direction that is perpendicular to the first direction; and a position conversion chamber connected to a first transport chamber among the transport chambers. The transport chambers include a rotational movement stage that rotates about a rotation axis that is perpendicular to the first direction and the second direction, and moves along a plane formed by the first direction and the second direction.

公开(公告)号：US09773600B2

公开(公告)日：2017-09-26

申请号：US14752075

申请日：2015-06-26

Applicant: Samsung Display Co., LTD.

Inventor： Jeongwon Han ,  Dosun Kim ,  Masao Nishiguchi ,  Youngmin Baik

IPC: H01F7/02 ,  C23C14/04 ,  H01L51/56

CPC classification number: H01F7/0221 ,  C23C14/042 ,  H01L51/56

Abstract: A magnet plate assembly includes: a magnetic body; a magnet support which supports the magnetic body and has a first protrusion; a guide part which supports the magnet support and has a first opening through which the first protrusion passes; a first frame formed extending in a width direction of the magnet support, to accommodate the first protrusion; a first mother block which is disposed adjacent to one end side of the guide part, is contactable with one end of the guide part, and moves the guide part in a length direction; and a second mother block which is disposed adjacent to another end side of the guide part, is contactable with the other end of the guide part, and moves or fixes the guide part, wherein the first protrusion is formed slidable in the width direction on the first frame.

公开(公告)号：US20160078988A1

公开(公告)日：2016-03-17

申请号：US14752075

申请日：2015-06-26

Applicant: Samsung Display Co., LTD.

Inventor： Jeongwon Han ,  Dosun Kim ,  Masao Nishiguchi ,  Youngmin Baik

IPC: H01F7/02 ,  H01L33/00 ,  H01L51/56

CPC classification number: H01F7/0221 ,  C23C14/042 ,  H01L51/56

Abstract: A magnet plate assembly includes: a magnetic body; a magnet support which supports the magnetic body and has a first protrusion; a guide part which supports the magnet support and has a first opening through which the first protrusion passes; a first frame formed extending in a width direction of the magnet support, to accommodate the first protrusion; a first mother block which is disposed adjacent to one end side of the guide part, is contactable with one end of the guide part, and moves the guide part in a length direction; and a second mother block which is disposed adjacent to another end side of the guide part, is contactable with the other end of the guide part, and moves or fixes the guide part, wherein the first protrusion is formed slidable in the width direction on the first frame.

Abstract translation: 磁板组件包括：磁体; 支撑磁体并具有第一突起的磁体支架; 引导部，其支撑所述磁体支撑并具有所述第一突起穿过的第一开口; 第一框架，其形成为沿着所述磁体支撑件的宽度方向延伸，以容纳所述第一突出部; 与引导部的一端侧相邻配置的第一母体块能够与引导部的一端接触，并且在长度方向上移动引导部; 以及与所述引导部的另一端侧相邻配置的第二母块，与所述引导部的另一端接触，并且使所述引导部移动或固定，其中，所述第一突起形成为能够在所述宽度方向上滑动 第一帧。