公开(公告)号：US20240301543A1

公开(公告)日：2024-09-12

申请号：US18509692

申请日：2023-11-15

Applicant: Samsung Display Co., LTD.

Inventor： Se Il KIM ,  Sang Min YI ,  Seung Jin LEE ,  Ji Yun CHUN

IPC: C23C14/04 ,  H10K71/16

CPC classification number: C23C14/042 ,  H10K71/166

Abstract: A mask includes a plurality of deposition pattern portions, each of the plurality of deposition pattern portions including rib portions disposed between the plurality of deposition pattern portions. A plurality of openings is defined in each of the plurality of deposition pattern portions, the mask has a width in a first direction and a length in a second direction which intersects the first direction, sides of each of openings which are parallel to the first direction, among the plurality of openings, have a first taper angle, and the first taper angle is about 54 degrees or less.