公开(公告)号：US20240077303A1

公开(公告)日：2024-03-07

申请号：US18219606

申请日：2023-07-07

Applicant: Samsung Display Co., LTD.

Inventor： GIHYUN LEE ,  JAISUN KYOUNG

IPC: G01B11/06 ,  H01J49/10

CPC classification number: G01B11/06 ,  H01J49/105

Abstract: A method for analyzing a thin film includes: preparing a main sample and a plurality of comparative samples, each of which includes a first layer composed of a first material and a second layer composed of a second material and a third material, the first layer and the second layer being stacked, where each of the plurality of comparative samples has a different amount of the second material from the main sample; measuring optical constants of the main sample and the comparative samples; deriving a linear relation equation between each of the optical constants of the main sample and the comparative samples and the material amount of the second material of a corresponding one of the main sample and the comparative samples; and calculating a material composition ratio of the main sample based on the material amount of the second material of the main sample and the linear relation equation.