公开(公告)号：US20230381832A1

公开(公告)日：2023-11-30

申请号：US18112716

申请日：2023-02-22

Applicant: Samsung Display Co., LTD.

Inventor： Jai Phoong KIM ,  Jae Hoon LEE ,  Hyuk KANG ,  Chang Uk AN ,  Han Geul LIM ,  Byung Jin CHOI

IPC: B08B3/12

CPC classification number: B08B3/12 ,  B08B2203/007

Abstract: A mask cleaning apparatus includes a cleaning bath including an accommodating space in which a cleaning solution is stored, a transfer robot transferring a mask, and an induction heating member disposed inside the accommodating space. The cleaning bath includes at least one side and a bottom surface, which define the accommodating space. The induction heating member includes a first heating member, a second heating member, and a waterproof layer covering the first heating member and the second heating member.