Illumination apparatus and optical inspection apparatus including the same

    公开(公告)号:US11549662B2

    公开(公告)日:2023-01-10

    申请号:US17539754

    申请日:2021-12-01

    Abstract: An illumination apparatus includes a main light source, a half mirror, and a diffusion plate. The main light source emits main light. The half mirror is spaced apart from the main light source. The half mirror reflects a first light travelling in a first direction among the main light source. The half mirror has a reflective surface reflecting the first light to travel in a second direction. The diffusion plate is disposed between the main light source and the half mirror not overlapping the reflective surface. The diffusion plate has a first horizontal surface and a second horizontal surface. The second horizontal surface is a rear surface of the first horizontal surface. The diffusion plate transmits a second light incident on the first horizontal surface among the main light. The diffusion plate scatters the second light from the second horizontal surface.

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