公开(公告)号：US20200302205A1

公开(公告)日：2020-09-24

申请号：US16826983

申请日：2020-03-23

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto CARMINATI ,  Fabio BOTTINELLI

IPC: G06K9/20 ,  G06K9/00 ,  G01S17/894

Abstract: A substrate and a covering structure coupled to the substrate form a chamber. The chamber houses an emitter configured to emit a radiation, a resonant reflector, a detector, and a fixed reflector. First and second windows extend through the covering structure. The emitter, the first reflector and the second reflector are reciprocally arranged such that radiation emitted from the emitter is reflected by the fixed reflector towards the MEMS reflector for further reflection towards the first window to form an output signal. The detector and the second window are reciprocally arranged such that an incoming radiation passing through the second window is received by the detector. The electronic module can be used for a 3D sensing application.

公开(公告)号：US20220277536A1

公开(公告)日：2022-09-01

申请号：US17750010

申请日：2022-05-20

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto CARMINATI ,  Fabio BOTTINELLI

IPC: G06V10/145 ,  G01S17/894 ,  G06V20/64 ,  G06V40/16

Abstract: A method of manufacturing an electronic module includes providing a base substrate having a first surface, providing a first supporting element having a first portion with an inclined top surface, and affixing the first supporting element to the first surface such that the inclined top surface is inclined with respect to the base substrate. A first reflector is coupled to the inclined top surface such that a rear surface of the first reflector is in physical contact with the inclined top surface of the first portion of the first supporting element, and a spacer structure is configured to form an interface for mounting lateral walls to the base substrate. A cap is positioned over and supported by the lateral walls to thereby define a chamber. The emitter, as well as a detector, are coupled to the first surface of the base substrate.