公开(公告)号：US11585825B2

公开(公告)日：2023-02-21

申请号：US17054133

申请日：2019-09-26

申请人： SOUTHEAST UNIVERSITY

发明人： Zhenxiang Yi ,  Yu Wang ,  Wenjun Deng ,  Lifeng Wang ,  Ming Qin ,  Qingan Huang

IPC分类号： G01P5/08

摘要： Disclosed is a wind speed sensor based on a flexible inductor and a silicon-based inductor, which relates to a MEMS device and belongs to the field of measurement and testing technologies. The wind speed sensor is a double-layer inductor structure composed of a flexible inductor and a silicon-based inductor. A metal layer of the flexible inductor and a metal layer of the silicon-based inductor face to each other and form, between them, an air cavity sufficient for mutual induction of electromotance. A contact block constituting a measuring port is deposited in the metal layer of the silicon-based inductor. The present invention has a light structure, and implements wind speed detection based on the Bernoulli effect and the coil mutual inductance effect.