公开(公告)号：US20230314377A1

公开(公告)日：2023-10-05

申请号：US18332697

申请日：2023-06-09

Applicant: SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY CHINESE ACADEMY OF SCIENCES

Inventor： Long MENG ,  Wei ZHOU ,  Hairong ZHENG ,  Lili NIU ,  Zhengrong LIN ,  Benxian PENG ,  Farooq UMAR ,  Yingjian CUI

IPC: G01N29/02 ,  H03H9/25 ,  H03H9/02 ,  H03H3/10

CPC classification number: G01N29/022 ,  H03H9/25 ,  H03H9/02574 ,  H03H3/10

Abstract: The present invention discloses a real-time ultrasonic stimulation electric signal recording chip and a preparation method thereof, where the preparation method includes the following steps: S1 manufacturing an interdigital electrode on a piezoelectric substrate to obtain a surface acoustic wave chip, and manufacturing a recording electrode and an electrode lead; S2, manufacturing an insulation protection layer on the chip obtained in the S1, and processing the insulation protection layer to form the recording electrode, so as to obtain a chip combining the interdigital electrode and the recording electrode; S3, preparing a PDMS cavity; and S4, bonding the PDMS cavity prepared in the S3 and the chip obtained in the S2. In the present invention, combining the interdigital electrode generating a surface acoustic wave ultrasound with a multi-channel recording electrode, such that real-time recording of a multi-channel electric signal under ultrasonic stimulation is achieved.