公开(公告)号：US20170102535A1

公开(公告)日：2017-04-13

申请号：US15285775

申请日：2016-10-05

Applicant: Seiko Epson Corporation

Inventor： Tomonori MATSUSHITA

IPC: G02B26/00 ,  G02B27/00

CPC classification number: G02B26/001 ,  G01J3/26 ,  G02B5/285 ,  G02B27/0012

Abstract: A wavelength variable interference filter includes a fixed reflection film, a movable reflection film, and an actuator that changes a gap between the films. A wavelength of output light is first wavelength λα. A center wavelength in a target wavelength region is measurement center wavelength λ0. A peak center wavelength in reflection characteristics of the movable reflection film is first center wavelength λ1. A peak center wavelength in reflection characteristics of the fixed reflection film is second center wavelength λ2. The gap between the films when light of the first wavelength λα is transmitted is dα(λ1, λ2). When a pair of optical films face each other, a center wavelength in reflection characteristics of the pair is the measurement center wavelength λ0, and the light of the first wavelength λα is outputted, the gap between the pair of optical films is dα(λ0, λ0). Further, dα(λ1, λ2)

公开(公告)号：US20140211315A1

公开(公告)日：2014-07-31

申请号：US14165904

申请日：2014-01-28

Applicant: Seiko Epson Corporation

Inventor： Tomonori MATSUSHITA

IPC: G02B26/00

CPC classification number: G02B26/001 ,  G01J3/027 ,  G01J3/26 ,  G01J3/51 ,  G01N21/31 ,  G01N21/35 ,  G01N21/658 ,  G01N2021/3144

Abstract: An optical module includes a stationary substrate, a movable substrate, a stationary reflecting film provided to the stationary substrate, a movable reflecting film provided to the movable substrate and opposed to the stationary reflecting film, a first control electrode disposed outside the stationary reflecting film in a filter plan view, a second control electrode disposed outside the movable reflecting film in the filter plan view, and opposed to the first control electrode, and a tilt control section adapted to make a first control current flow through the first control electrode, and make a second control current, which has an opposite direction to the first control current in the filter plan view, flow through the second control electrode.

Abstract translation: 光学模块包括固定基板，可移动基板，设置在固定基板上的固定反射膜，设置在可移动基板上并与固定反射膜相对的可移动反射膜，设置在固定反射膜外侧的第一控制电极 过滤器平面图，在过滤器平面图中设置在可移动反射膜外侧并与第一控制电极相对的第二控制电极，以及用于使第一控制电流流过第一控制电极的倾斜控制部， 在过滤器平面图中具有与第一控制电流相反的方向的第二控制电流流过第二控制电极。

公开(公告)号：US20210333148A1

公开(公告)日：2021-10-28

申请号：US17238165

申请日：2021-04-22

Applicant: SEIKO EPSON CORPORATION

Inventor： Tomonori MATSUSHITA

IPC: G01J1/42 ,  G01J1/02

Abstract: A measurement apparatus includes a light source that emits light, a spectroscopic element that is configured to transmit light of a predetermined wavelength out of the light emitted from the light source portion, and capable of changing the predetermined wavelength of the light to be transmitted within a predetermined wavelength range, an interference optical system which separates light emitted from the spectroscopic element into measurement light irradiated on a measurement target and reference light reflected by a reference body, and generates interference light obtained by combining the measurement light reflected by the measurement target and the reference light reflected by the reference body, an image sensor that receives the interference light, and one or more processors configured to calculate a position of the measurement target based on spectrum information indicating a change in a received light quantity at the light receiving portion when the predetermined wavelength of the light transmitted through the spectroscopic element is changed.

公开(公告)号：US20200073034A1

公开(公告)日：2020-03-05

申请号：US16554681

申请日：2019-08-29

Applicant: Seiko Epson Corporation

Inventor： Tomonori MATSUSHITA ,  Teruyuki NISHIMURA ,  Nozomu HIROKUBO

IPC: G02B5/28 ,  G01J3/26

Abstract: An optical device includes an optical member having a plurality of first optical layers and a plurality of second optical layers having a refractive index different from that of the first optical layer in which the first optical layers and the second optical layers are laminated, and a layer thickness changing electrode that changes a thickness of the first optical layer in a lamination direction of the first optical layers and the second optical layers, in which the optical member is provided in a pair, and the pair of optical members is disposed to face each other through a gap, and a gap changing driver that changes a dimension of the gap.

公开(公告)号：US20130181120A1

公开(公告)日：2013-07-18

申请号：US13742701

申请日：2013-01-16

Applicant: Seiko Epson Corporation

Inventor： Susumu SHINTO ,  Koji KITAHARA ,  Tomonori MATSUSHITA

IPC: G02B5/28 ,  G01J1/04

CPC classification number: G02B5/284 ,  G01J1/0488 ,  G02B5/0808 ,  G02B26/001

Abstract: An interference filter includes first and second reflecting films opposed to each other across a gap, the first and second reflecting films include an Ag—Sm—Cu alloy film or an Ag—Bi—Nd alloy film, the Ag—Sm—Cu alloy film includes 0.1 atomic %≦Sm≦0.5 atomic %, and 0.1 atomic %≦Cu and ≦0.5 atomic %, and Sm+Cu≦1.0 atomic %, the Ag—Bi—Nd alloy film includes 0.1 atomic %≦Bi≦3.0 atomic %, and 0.1 atomic %≦Nd≦5.0 atomic %, and the thickness of the Ag—Sm—Cu alloy film or the Ag—Bi—Nd alloy film is ≧10 nm and ≦40 nm.

Abstract translation: 干涉滤光器包括跨越间隙彼此相对的第一和第二反射膜，第一和第二反射膜包括Ag-Sm-Cu合金膜或Ag-Bi-Nd合金膜，Ag-Sm-Cu合金膜 包括0.1原子％@SiO @ 0.5原子％，0.1原子％@ Cu和≤0.5原子％，Sm + Cu1.0原子％，Ag-Bi-Nd合金膜包括0.1原子％@Bi≤3.0原子％ ，0.1原子％@钕5.0原子％，Ag-Sm-Cu合金膜或Ag-Bi-Nd合金膜的厚度> 10nm〜40nm。

公开(公告)号：US20210025754A1

公开(公告)日：2021-01-28

申请号：US16937924

申请日：2020-07-24

Applicant: Seiko Epson Corporation

Inventor： Tomonori MATSUSHITA ,  Teruyuki NISHIMURA ,  Kei KUDO

IPC: G01J3/28 ,  G02B5/28 ,  G01J3/26

Abstract: A spectroscopic camera includes an interference filter including a pair of reflection films and an imaging device that captures image light passing through the pair of reflection films. The interference filter is provided with a marker that changes the characteristic in accordance with which the image light passes, and the marker is provided in a position where the marker overlaps with the optical path of the image light that passes through the pair of reflection films.

公开(公告)号：US20200183146A1

公开(公告)日：2020-06-11

申请号：US16788602

申请日：2020-02-12

Applicant: Seiko Epson Corporation

Inventor： Tomonori MATSUSHITA ,  Nozomu HIROKUBO

IPC: G02B26/00 ,  G01J3/02 ,  G01J3/50 ,  G01J3/42 ,  G01J3/32 ,  G01J3/28 ,  G01J3/10 ,  G01J3/06 ,  G01J3/26

Abstract: An optical module includes a wavelength variable interference filter having a fixed reflective film, a movable reflective film which faces the fixed reflective film with a gap between reflective films interposed therebetween, and an electrostatic actuator that changes the gap between reflective films, and a gap control unit that controls the electrostatic actuator. The gap control unit controls the electrostatic actuator on the basis of an order which is set in accordance with a wavelength to be measured, and changes the gap between the reflective films.

公开(公告)号：US20160003993A1

公开(公告)日：2016-01-07

申请号：US14848680

申请日：2015-09-09

Applicant: Seiko Epson Corporation

Inventor： Tomonori MATSUSHITA ,  Tatsuo URUSHIDANI

IPC: G02B5/28 ,  G02B26/00 ,  G01J3/26

CPC classification number: G02B5/288 ,  G01J3/26 ,  G02B5/284 ,  G02B26/001

Abstract: An optical filter includes: a first variable wavelength bandpass filter that can extract light of a first wavelength band (400 to 460 nm), the first wavelength band having a first spectral band having a central wavelength equal to a first wavelength in the first wavelength band and a second spectral band having a central wavelength equal to a second wavelength in the first wavelength band; and a second variable wavelength bandpass filter that can extract light of a second wavelength band (480 to 540 nm) adjacent to the first wavelength band, the second wavelength band having a third spectral band having a central wavelength equal to a third wavelength in the second wavelength band and a fourth spectral band having a central wavelength equal to a fourth wavelength in the second wavelength band.

Abstract translation: 一种滤光器包括：第一可变波长带通滤波器，其可以提取第一波长带（400至460nm）的光，所述第一波长带具有第一波段，所述第一光谱带具有等于所述第一波长带中的第一波长的中心波长 以及第二光谱带，其具有等于第一波长带中的第二波长的中心波长; 以及第二可变波长带通滤波器，其可以提取与所述第一波长带相邻的第二波长带（480至540nm）的光，所述第二波长带具有在所述第二波长带中具有等于第三波长的中心波长的第三光谱带 波长带和在第二波长带中具有等于第四波长的中心波长的第四光谱带。

公开(公告)号：US20150138640A1

公开(公告)日：2015-05-21

申请号：US14546415

申请日：2014-11-18

Applicant: Seiko Epson Corporation

Inventor： Tomonori MATSUSHITA

IPC: G02B26/00 ,  G02B5/26 ,  G02B5/22 ,  G02B5/28

CPC classification number: G02B26/001 ,  G01J3/26 ,  G01J3/51 ,  G01J2003/1213 ,  G01J2003/1234 ,  G02B5/22 ,  G02B5/26 ,  G02B5/28 ,  G02B5/284

Abstract: An optical filter device includes a variable wavelength interference filter having a pair of reflecting films opposed to each other, and an electrostatic actuator adapted to change a gap dimension between the pair of reflecting films, and at least one bandpass filter disposed on an optical axis of the pair of reflecting films, and the bandpass filter includes a plurality of transmission wavelength bands in which light is transmitted.

Abstract translation: 一种光学滤波器装置包括具有彼此相对的一对反射膜的可变波长干涉滤光器，以及适于改变该对反射膜之间的间隙尺寸的静电致动器，以及设置在光轴上的至少一个带通滤光器 一对反射膜和带通滤光器包括发射光的多个透射波长带。

公开(公告)号：US20140268342A1

公开(公告)日：2014-09-18

申请号：US14208614

申请日：2014-03-13

Applicant: Seiko Epson Corporation

Inventor： Tomonori MATSUSHITA

IPC: G02B26/00 ,  G02B5/28

CPC classification number: G02B5/284 ,  G01J3/0229 ,  G01J3/0262 ,  G01J3/26 ,  G01J3/51 ,  G02B26/001

Abstract: An optical filter device includes a housing including a light passage hole making light incident on the inner side, an aperture on the outer side of the housing and limiting the light made incident on the incident light passage hole, and an interference filter on the inner side of the housing and including a fixed reflection film and a movable reflection film. In a plan view of the fixed reflection film and the movable reflection film, an opening of the aperture, the light passage hole, and the fixed reflection film and the movable reflection film overlap one another. When the diameter of the fixed reflection film close to the light passage hole is Φm, the bore of the light passage hole is Φp, and the opening diameter of the aperture is Φa, Φa

Abstract translation: 一种滤光器装置，包括壳体，该壳体包括使入射在内侧的光的光通过孔，外壳的外侧上的孔，并限制入射在入射光通过孔上的光，以及内侧的干涉滤光器 并且包括固定反射膜和可移动反射膜。 在固定反射膜和可动反射膜的平面图中，孔，光通过孔，固定反射膜和可动反射膜的开口彼此重叠。 当靠近光通过孔的固定反射膜的直径为Φm时，光通孔的孔径为Φp，孔径为Φa，Φa<Φm<Φp。