公开(公告)号：US20030030513A1

公开(公告)日：2003-02-13

申请号：US10211578

申请日：2002-08-05

申请人： SEIKO EPSON CORPORATION

发明人： Takashi Yamazaki ,  Keigo Iizawa ,  Shigeo Kanna

IPC分类号： H03H009/64

CPC分类号： H03H9/02551

摘要： The invention provides a surface acoustic wave device which uses an in-plane rotated ST cut quartz crystal plate around the Znull-axis, and which has a large reflection coefficient of the Rayleigh wave. Comb teeth-like IDT electrodes are provided and reflectors to trap the Rayleigh wave are provided on both sides of the IDT electrodes on the principal surface of the in-plane rotated ST cut quartz crystal plate. The electrode width and pitch at the IDT electrodes are defined as Lt, Pt, the width and pitch of short-circuit electrodes at the reflectors as Lr, Pr, and the thickness of the IDT electrodes and the short-circuit electrodes side as Ht and Hr. If the electrode widths and pitches are set up so that either or both of Lt/Pt and Lr/Pr become 0.32null0.1, this enables maximizing the reflection coefficient and achieving the miniaturization of device itself by reducing the number of the short-circuit electrodes.

摘要翻译： 本发明提供一种表面声波装置，其使用围绕Z'轴的平面内旋转的ST切割石英晶体板，并且其具有大的瑞利波的反射系数。 提供梳齿状IDT电极，并且在面内旋转的ST切割石英晶体板的主表面上的IDT电极的两侧设置有用于捕获瑞利波的反射器。 IDT电极的电极宽度和间距被定义为Lt，Pt，反射器上的短路电极的宽度和间距为Lr，Pr，IDT电极和短路电极侧的厚度为Ht， 呃 如果设置电极宽度和间距，使得Lt / Pt和Lr / Pr中的任一个或两者变为0.32±0.1，则能够通过减少短路电极的数量来最大化反射系数并实现器件本身的小型化 。

公开(公告)号：US20030052572A1

公开(公告)日：2003-03-20

申请号：US10229210

申请日：2002-08-28

申请人： SEIKO EPSON CORPORATION

发明人： Keigo Iizawa ,  Takashi Yamazaki ,  Shigeo Kanna

IPC分类号： H03H009/25

CPC分类号： H03H3/10 ,  H03H9/02551

摘要： The invention provides a method for adjusting the temperature-dependent property of a surface acoustic wave device is provided. The method is appropriate for a temperature-dependent property that is expressed by a cubic function of a surface acoustic wave device using an in-plane rotated ST cut quartz crystal plate. The invention therefore provides a method for adjusting the temperature-dependent property of a surface acoustic wave device using an in-plane rotated ST cut quartz crystal plate having Euler angles of (0null, 113-135null, null(40-49null)). The range of Euler angles is defined so that the temperature-dependent property of the surface acoustic wave device, using an in-plane rotated ST cut quartz crystal plate having the temperature-dependent property expressed by a cubic function, has an extreme value within the temperature range of null40 to null85null C., and the temperature-dependent property is rotated about the inflection point to minimize the frequency fluctuation within the operational temperature range by using appropriate regions.

摘要翻译： 本发明提供一种用于调节表面声波装置的温度依赖性的方法。 该方法适用于使用面内旋转的ST切割石英晶体板的表面声波装置的三次函数表示的温度依赖性。 因此，本发明提供了一种使用具有（0°，113-135°，±（40-49°））欧拉角的平面内旋转的ST切割石英晶体板来调节声表面波器件的温度依赖性的方法， ）。 欧拉角的范围被定义为使用具有由三次函数表示的温度依赖性的平面内旋转的ST切割石英晶体板，声表面波器件的温度依赖特性在 温度范围为-40至+ 85℃，并且温度依赖性质围绕拐点旋转，以通过使用适当的区域使工作温度范围内的频率波动最小化。

公开(公告)号：US20040251989A1

公开(公告)日：2004-12-16

申请号：US10679480

申请日：2003-10-07

申请人： SEIKO EPSON CORPORATION

发明人： Michiaki Takagi ,  Yoshio Maeda ,  Takashi Yamazaki ,  Keigo Iizawa

IPC分类号： H03H009/64

CPC分类号： H03H9/25 ,  H03H9/02551 ,  H03H9/14582

摘要： In a substrate in which a reflection coefficient null of a surface acoustic wave per electrode is small, the invention obtains a Q value or a CI value level, which is equivalent to or higher than that of a related art product, at a device size which is equivalent to the related art product which addresses the problem that the size of a surface acoustic wave resonator becomes larger. A surface acoustic wave resonator includes one interdigital transducer to excite a surface acoustic wave in a propagation direction x on a piezoelectric plate and a pair of reflectors arranged on both sides thereof in the propagation direction. The interdigital transducer is divided into three regions. The electrode fingers of the interdigital transducer of each region are formed at a fixed pitch which differs within 2%. The surface acoustic wave resonator possesses a single peak response. The form in which a vibration displacement envelope amplitude in the interdigital transducer region is normalized is a form which takes a maximum value 1 at the center position, which smoothly takes a value in a range of 0.33 to 0.53 at a position null from both ends, and which smoothly takes a value in a range of 0.048 to 0.177 at positions at both ends.

摘要翻译： 在每个电极的表面声波的反射系数γ小的基板中，本发明以如下装置尺寸获得与现有技术产品相同或更高的Q值或CI值电平 相当于解决声表面波谐振器的尺寸变大的问题的现有技术的产品。 表面声波谐振器包括一个叉指式换能器，以在压电板上的传播方向x上激发表面声波，并且在传播方向的两侧布置一对反射器。 叉指换能器分为三个区域。 每个区域的叉指换能器的电极指以固定的间距形成，其在2％内不同。 表面声波谐振器具有单峰响应。 叉指换能器区域中的振动位移包络振幅被归一化的形式是在中心位置处取最大值1的形式，在两端的位置¼平滑地取0.33〜0.53的范围内的值， 并且在两端的位置平滑地获得0.048〜0.177的范围的值。

公开(公告)号：US20030146810A1

公开(公告)日：2003-08-07

申请号：US10329445

申请日：2002-12-27

申请人： SEIKO EPSON CORPORATION

发明人： Takashi Yamazaki ,  Keigo Iizawa ,  Shigeo Kanna

IPC分类号： H03H009/64

CPC分类号： H03H9/25 ,  H03H9/02543

摘要： The invention provides an in-plane rotational ST-cut SAW resonator that is formed of an in-plane rotational ST-cut crystal plate having Eulerian angles of (0null, 113null to 135null, and null(40null to 49null)). The in-plane rotational ST-cut SAW resonator can include an interdigital transducer (IDT) electrode for exciting a Rayleigh wave on the main surface. The ratio Lt/Pt of the electrode width Lt and the interelectrode pitch Pt of the IDT electrode is 0.5 or more and 0.65 or less. Accordingly, a reduction in the fluctuation in resonance frequency relative to the variations in an IDT electrode of a surface acoustic wave device by using the in-plane rotated ST-cut crystal plate around the Znull-axis can be achieved.

摘要翻译： 本发明提供一种面内旋转ST切割SAW谐振器，其由具有（0°，113°至135°和±（40°至49°））的欧拉角的平面内旋转ST切割晶体板形成， ）。 平面内旋转ST切割SAW谐振器可以包括用于激励主表面上的瑞利波的叉指式换能器（IDT）电极。 电极宽度Lt的比率Lt / Pt和IDT电极的电极间间距Pt为0.5以上且0.65以下。 因此，通过使用围绕Z'轴的平面内旋转的ST切割晶体板，可以实现相对于声表面波器件的IDT电极的变化的共振频率的波动的减小。