公开(公告)号：US20240359220A1

公开(公告)日：2024-10-31

申请号：US18648197

申请日：2024-04-26

申请人： SCREEN Holdings Co., Ltd.

发明人： Shigeru YAMAMOTO ,  Yasuhiko NAGAI ,  Keiji IWATA ,  Takashi AKIYAMA ,  Akira ITO ,  Daiki FUJII ,  Kazuki GODA ,  Yosuke NISHINO ,  Yuya KAWAI ,  Kenji EDAMITSU

IPC分类号： B08B9/027 ,  H01L21/67

CPC分类号： B08B9/027 ,  H01L21/6715 ,  B08B2209/027

摘要： Provided is a substrate treating apparatus for treating a substrate. The substrate treating apparatus includes a substrate treating unit configured to supply a water-insoluble water repellent to the substrate to perform water-repellent treatment to the substrate, a decomposition solution mixing mechanism configured to mix a decomposition solution for decomposing the water repellent to a water repellent-containing liquid that contains the water repellent as a waste liquid generated through the water-repellent treatment of the substrate, and a discharging unit configured to discharge a mixed liquid of the water repellent-containing liquid and the decomposition solution to an outside of the substrate treating apparatus.