公开(公告)号：US20250046588A1

公开(公告)日：2025-02-06

申请号：US18657015

申请日：2024-05-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Youn Sok Choi ,  Ju Hyun Kim ,  Hae Wook Park ,  Young Yoon

IPC: H01J37/32

Abstract: A plasma diagnosis device and a method for manufacturing the plasma diagnosis device are provided. The plasma diagnosis device includes: a process chamber in which processes using plasma are performed; a probe structure which includes a protective layer having a first face abutting the plasma, a second face opposite to the first face, and an outer wall connecting the first face and the second face inside the process chamber, and a conductive measuring unit spaced apart from the first face of the protective layer and configured to measure a status of the plasma; and a wafer on a periphery of the probe structure and in contact with the outer wall of the protective layer, in which the wafer and the protective layer include materials different from each other.

公开(公告)号：US09812372B2

公开(公告)日：2017-11-07

申请号：US15232151

申请日：2016-08-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Youn Sok Choi ,  Jeong Hyoun Sung ,  Sang Yoon Soh

IPC: H01L21/66 ,  H01L21/683

CPC classification number: H01L22/12 ,  H01L21/67103 ,  H01L21/67109 ,  H01L21/67248 ,  H01L21/6831 ,  H01L21/6833

Abstract: An electrostatic chuck assembly includes a reference temperature sensor, a measurement zone temperature sensor, and a measurement zone temperature calculator. The reference temperature sensor measures a reference temperature of the electrostatic chuck. The measurement zone temperature sensor is spaced from the reference temperature sensor on the electrostatic chuck and senses temperature signals of a plurality measurement zones of the electrostatic chuck. The measurement zone temperature calculator calculates a temperature of each of the measurement zones by setting a measurement range within a temperature range, previously determined based on the reference temperature measured by the reference temperature sensor, and measures the temperature signal of each of the measurement zones sensed by the measurement zone temperature sensor within the measurement range.