公开(公告)号：US11532328B2

公开(公告)日：2022-12-20

申请号：US16375157

申请日：2019-04-04

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Won Young Jee ,  Sung Ki Roh ,  Min Uk Kim ,  Sung Soo Kim ,  Woong Sik Nam ,  Sung-Gyu Park ,  Se Young Oh

IPC: B05D3/06 ,  G11B7/095 ,  F01C1/12 ,  H01L21/67

Abstract: A multi-curing apparatus includes an actuator, a first chamber including a first energy source head, a second chamber including a second energy source head, a first driver including a first rotation transmission gear gear-engaged with the actuator, and a first driving gear gear-engaged with the first chamber. The apparatus further includes a second driver including a second rotation transmission gear gear-engaged with the actuator, and a second driving gear gear-engaged with the second chamber. The apparatus aligns a position of the first chamber with reference to a position of the second chamber while the first rotation transmission gear, the second rotation transmission gear, and the second driving gear are fixed.