公开(公告)号：US09411191B2

公开(公告)日：2016-08-09

申请号：US14738320

申请日：2015-06-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seong-eun Chung ,  Tae-bae Kim ,  Il-yong Jung

IPC: G02F1/1335 ,  G03F7/40 ,  C09K13/00 ,  G03F7/004 ,  G03F7/09 ,  G03F7/00 ,  G03F7/095

CPC classification number: G02F1/133528 ,  C09K13/00 ,  G02F2001/133548 ,  G03F7/0002 ,  G03F7/0035 ,  G03F7/0041 ,  G03F7/094 ,  G03F7/095 ,  G03F7/2016 ,  G03F7/40

Abstract: A method of manufacturing a linear grid for a display panel, the method including: applying a material layer for the linear grid to a substrate; laminating a negative photoresist layer having a pattern of the linear grid to a target area within an entire area of the material layer; laminating a positive photoresist layer to the entire area of the material layer; covering, with a mask for blocking ultraviolet light, areas within the entire area not including the target area, and emitting the ultraviolet light; etching the material layer according to the negative photoresist layer exposed by the ultraviolet light; and forming the pattern of the linear grid on the material layer by removing the negative photoresist layer and the positive photoresist layer from the entire area.

Abstract translation: 一种制造用于显示面板的线性栅格的方法，所述方法包括：将线性栅格的材料层施加到衬底; 将具有线性网格图案的负性光致抗蚀剂层层压到材料层的整个区域内的目标区域; 将正性光致抗蚀剂层层压到材料层的整个区域; 用遮蔽紫外线的掩模覆盖不包括目标区域的整个区域内的区域，并发射紫外光; 根据由紫外线曝光的负性光致抗蚀剂层蚀刻材料层; 以及通过从整个区域去除负的光致抗蚀剂层和正的光致抗蚀剂层，在材料层上形成线性栅格的图案。