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公开(公告)号:US11848342B2
公开(公告)日:2023-12-19
申请号:US17218662
申请日:2021-03-31
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sunyoung Bang , Seungjoo Nah , Hoemin Jeong , Heegeun Jeong
IPC: H01L27/146
CPC classification number: H01L27/14621 , H01L27/14627
Abstract: An image sensor includes: a substrate having a first surface and a second surface that are opposite to each other; a plurality of color filters on the substrate; a fence pattern between adjacent color filters of the plurality of color filters; and a protective layer between the substrate and the plurality of color filters, wherein the protective layer covers the fence pattern. The fence pattern includes: a first fence pattern having a first bottom surface and a first top surface that are opposite to each other; and a second fence pattern on the first top surface of the first fence pattern. A width at the first bottom surface of the first fence pattern is less than a width of the second fence pattern, and the protective layer covers a sidewall of the first fence pattern.