公开(公告)号：US20210159112A1

公开(公告)日：2021-05-27

申请号：US16895513

申请日：2020-06-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Byeongsang Kim ,  Keonwoo Kim ,  Wooram Kim ,  Eungsu Kim ,  Heewon Min ,  Sangwook Park ,  Seungwon Shin ,  Dongyun Yeo ,  Geunsik Oh ,  Hyanjung Lee

IPC: H01L21/687 ,  H01L21/67 ,  H01L21/683 ,  H01J37/20

Abstract: A lift apparatus for moving an object up and down in a substrate processing apparatus, the lift apparatus including a body configured to support the object while a lift hole, included in the body, is overlapped by the object in a vertical direction; a lift pin configured to move the object up and down by moving up and down in the lift hole; a bellows including an upper flange, a lower flange, and a flexible pipe; a connector combined with a lower portion of the lift pin in the flexible pipe and configured to interfere with downward movement of the lift pin and to allow at least one from among rotation, sliding, and tilting of the lift pin; a load sensor configured to measure vertical load generated in accordance with movement of the lift pin; and an actuator configured to move the lift pin up and down.

公开(公告)号：US11984344B2

公开(公告)日：2024-05-14

申请号：US16895513

申请日：2020-06-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Byeongsang Kim ,  Keonwoo Kim ,  Wooram Kim ,  Eungsu Kim ,  Heewon Min ,  Sangwook Park ,  Seungwon Shin ,  Dongyun Yeo ,  Geunsik Oh ,  Hyanjung Lee

IPC: H01L21/687 ,  H01J37/20 ,  H01L21/67 ,  H01L21/683

CPC classification number: H01L21/68742 ,  H01J37/20 ,  H01L21/67242 ,  H01L21/6831 ,  H01J2237/334

Abstract: A lift apparatus for moving an object up and down in a substrate processing apparatus, the lift apparatus including a body configured to support the object while a lift hole, included in the body, is overlapped by the object in a vertical direction; a lift pin configured to move the object up and down by moving up and down in the lift hole; a bellows including an upper flange, a lower flange, and a flexible pipe; a connector combined with a lower portion of the lift pin in the flexible pipe and configured to interfere with downward movement of the lift pin and to allow at least one from among rotation, sliding, and tilting of the lift pin; a load sensor configured to measure vertical load generated in accordance with movement of the lift pin; and an actuator configured to move the lift pin up and down.

公开(公告)号：US12219062B2

公开(公告)日：2025-02-04

申请号：US17846574

申请日：2022-06-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Bumhan Kim ,  Eunbi Kim ,  Hansang Song ,  Seungwon Shin

IPC: H04L9/32 ,  H04L9/08

Abstract: An electronic device and method are disclosed for managing a non-fungible token (NFT). The electronic device includes: a memory configured to store computer-executable instructions, and a processor. The processor implements the method, including: generating, a NFT for target content in response to receiving a request to register the target content from a first external electronic device, generating, for the NFT, a certification authority (CA) signature indicating that the NFT is generated by the server, and transmitting, via a communication circuitry, the NFT to the first external electronic device, wherein an ownership signature is added to the NFT, together with the CA signature, the ownership signature based on a private key of a user to which ownership of the NFT is assigned.