公开(公告)号：US20230117953A1

公开(公告)日：2023-04-20

申请号：US17877439

申请日：2022-07-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sejin OH ,  Youngdo Kim ,  Sanghun Kim ,  Sungyeol Kim ,  Sangki Nam ,  Taemin Earmme ,  Changyun Lee ,  Seongmoon Ha

IPC: H01J37/32

Abstract: A plasma generator may include a dielectric tube, an inner helical coil surrounding the dielectric tube and configured to generate plasma by forming a stationary wave of at least one of a magnetic field and an electromagnetic wave in the dielectric tube, a variable capacitor configuring a closed loop with the inner helical coil, an outer helical coil surrounding the inner helical coil and magnetically coupled to the inner helical coil, and a radio frequency (RF) power supply configured to provide RF power at a variable frequency to the inner helical coil.