公开(公告)号：US09897772B2

公开(公告)日：2018-02-20

申请号：US14563463

申请日：2014-12-08

Applicant: SAMSUNG ELECTRONICS CO., LTD. ,  SAMSUNG DISPLAY CO., LTD.

Inventor： Sang-Joon Hong ,  Hi-Kuk Lee ,  Sang-Don Jang

IPC: G02B7/02 ,  F16B11/00

CPC classification number: G02B7/025 ,  F16B11/008 ,  Y10T403/472

Abstract: Disclosed is a fixing module for fixing an optical system to an optical apparatus, including a coupling unit having a plate to couple to the apparatus, the coupling unit having a first penetrating space at a central portion thereof and a protruding portion protruded downwards from the plate; a first fixing unit combinable with the coupling unit and having a receiving space including a thermosetting resin such that the protruding portion is fixed into the thermosetting resin; and a second fixing unit combinable with the first fixing unit and having a second penetrating space communicating with the first penetrating space, such that the optical system can penetrate through the first and the second penetrating spaces and be fixed by the second fixing unit.

公开(公告)号：US10515844B2

公开(公告)日：2019-12-24

申请号：US16044701

申请日：2018-07-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sang-Joon Hong ,  Sang-Hyun Park

IPC: H01L21/687 ,  H01L21/68 ,  H01L21/677 ,  G02F1/13 ,  H01L21/683 ,  G03F7/20

Abstract: A substrate supporting and transferring apparatus and associated methods, the apparatus including a shuttle configured to move in a x-direction and a y-direction, the y-direction being perpendicular to the x-direction; a lower wedge block on the shuttle, the lower wedge block including a lower surface that is parallel with an upper surface of the shuttle and an upper surface that is inclined with respect to the lower surface of the lower wedge block; an upper wedge block on the lower wedge block, the upper wedge block including a lower surface that is parallel with the upper surface of the lower wedge block and an upper surface that is parallel with the upper surface of the shuttle; and a chuck on the upper wedge block, the chuck being configured to support a substrate.