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公开(公告)号:US20140252369A1
公开(公告)日:2014-09-11
申请号:US14160629
申请日:2014-01-22
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jae-hoon LEE , Chan-ho PARK , Nam-young LEE
IPC: H01L29/778 , H01L29/20 , H01L29/205
CPC classification number: H01L29/7787 , H01L29/2003 , H01L29/24 , H01L29/41766 , H01L29/432 , H01L29/66462
Abstract: A nitride-based semiconductor device including a substrate; a GaN-containing layer on the substrate; a nitride-containing layer on the GaN layer; a channel blocking layer on the nitride-containing layer, the channel blocking layer including a nitride-based semiconductor; a gate insulation layer on the channel blocking layer; and a gate electrode on the gate insulation layer.
Abstract translation: 一种氮化物系半导体器件,包括:衬底; 在该衬底上的含GaN层; GaN层上的含氮化物层; 在所述含氮化物层上的沟道阻挡层,所述沟道阻挡层包括氮化物基半导体; 沟道阻挡层上的栅极绝缘层; 以及栅极绝缘层上的栅电极。