公开(公告)号：US20250130268A1

公开(公告)日：2025-04-24

申请号：US18920172

申请日：2024-10-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Chunghyun KIM ,  Changsuk OH ,  Kiyoung JEON ,  Jaewon YOO ,  Myoungsuk JANG ,  Kwanghwa LEE ,  Seokjae HONG

IPC: G01R31/26 ,  H01L21/66

Abstract: A semiconductor test apparatus includes a base plate, side supporters provided as three or more on a lower surface of the base plate, an elastic cylinder and a side stopper provided on a lower surface of each of the side supporters, a center stopper provided laterally apart from the side supporters on the lower surface of the base plate, a stopper foot provided at one end of the center stopper, a foot supporter provided at one end of the stopper foot, a top plate disposed under the base plate to contact the elastic cylinder and the side stopper, the top plate including a center hole in a center portion thereof, and a substrate cover provided under the top plate, wherein the center stopper and the side stopper are selectively locked.