公开(公告)号：US20240416529A1

公开(公告)日：2024-12-19

申请号：US18522855

申请日：2023-11-29

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyunghoon Joo ,  Sunghyup Kim ,  Kiho Lee ,  Sanghoon Lee

IPC: B25J15/00 ,  H01L21/687

Abstract: A robot blade may include a blade body and a frequency variator. The blade body may include a frequency variation groove. The frequency variator may be detachably arranged in the frequency variation groove to vary a frequency of the blade body. Thus, the robot blade may have a changed shape by removing at least one frequency variation block included in the frequency variator. Therefore, the robot blade having the changed shape may have a frequency different from a frequency of a part in semiconductor fabrication equipment to prevent a resonance. As a result, a vibration of the robot blade may be suppressed to prevent damage to a semiconductor substrate.

公开(公告)号：US20240212992A1

公开(公告)日：2024-06-27

申请号：US18453378

申请日：2023-08-22

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Changheon Lee ,  Sangki Nam ,  Kuihyun Yoon ,  Kiho Lee ,  Sangho Lee ,  Sangheun Lee ,  Jaemin Rhee ,  Junghyun Cho ,  Seoyeon Choi

IPC: H01J37/32 ,  H01L21/683

CPC classification number: H01J37/32642 ,  H01J37/32715 ,  H01J37/3299 ,  H01L21/6833 ,  H01J2237/2007 ,  H01J2237/334

Abstract: Provided is a plasma processing apparatus including a substrate chuck in a chamber, a restriction ring surrounding an outer perimeter of the substrate chuck, a movable ring on the restriction ring, and an actuator configured to move the movable ring, wherein grooves formed in the restriction ring are opened or closed by movement of the movable ring. In addition, provided is a plasma processing method using the plasma processing apparatus.

公开(公告)号：US20150062435A1

公开(公告)日：2015-03-05

申请号：US14251927

申请日：2014-04-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kiho Lee

IPC: H04N5/14

CPC classification number: H04N5/20

Abstract: A video signal processing device may include a signal converter configured to generate a video output signal based on a video input signal and a reference signal, a reference signal generator configured to generate the reference signal. The reference signal may be adjusted to accommodate changes in the video input signal.

Abstract translation: 视频信号处理装置可以包括被配置为基于视频输入信号和参考信号产生视频输出信号的信号转换器，被配置为产生参考信号的参考信号发生器。 可以调整参考信号以适应视频输入信号的变化。