公开(公告)号：US20170084471A1

公开(公告)日：2017-03-23

申请号：US15208787

申请日：2016-07-13

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hongtaek LIM ,  Kangsoo KIM ,  Hojun KIM ,  Jeonghoon NAM ,  Sejun PARK

IPC: H01L21/67 ,  C23C16/50 ,  H01J37/32 ,  C23C16/455

CPC classification number: H01J37/3244 ,  C23C16/452 ,  C23C16/45512 ,  C23C16/45544 ,  C23C16/45565 ,  C23C16/50 ,  H01J37/32009

Abstract: A semiconductor device fabricating apparatus includes a gas mixer having an upper surface and a lower surface, each of the upper and lower surfaces has an elliptical plane, and a side surface connecting the upper and lower surfaces, a gas inlet pipe on an upper portion of the gas mixer, and a gas outlet pipe on a lower portion of the gas mixer.