公开(公告)号：US20230121884A1

公开(公告)日：2023-04-20

申请号：US17940635

申请日：2022-09-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： JAESUNG HUR ,  KIJOONG YOON ,  HAJIN LIM ,  JONGMIN JEON ,  TAEKSOO JEON ,  IN SUNG JOE

IPC: H01L27/146

Abstract: An image sensor includes a substrate, a plurality of unit pixels provided on a pixel area of the substrate, a plurality of device isolation patterns defining the plurality of unit pixels on the pixel area, a light-shield layer provided on a top surface of the substrate and comprising a grid structure defining a plurality of optical transmission regions, a plurality of color filters provided on the plurality of optical transmission regions of the light-shield layer, and a plurality of micro-lenses provided on the plurality color filters. The light-shield layer includes a light-shield pattern, a low-refractive pattern provided on the light-shield pattern, and a protection layer configured to cover the light-shield pattern and the low-refractive pattern on the substrate. The low-refractive pattern includes a porous silicon compound. Pores in the low-refractive pattern have a diameter of about 0.2 nm to about 1 nm.

公开(公告)号：US20230170376A1

公开(公告)日：2023-06-01

申请号：US18046491

申请日：2022-10-13

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： KIJOONG YOON ,  KEEWON KIM ,  MINKWAN KIM ,  SANGHOON AHN ,  HAJIN LIM ,  JONGMIN JEON ,  TAEKSOO JEON ,  JAESUNG HUR

IPC: H01L27/146

CPC classification number: H01L27/14685 ,  H01L27/14645 ,  H01L27/1462 ,  H01L27/14621 ,  H01L27/14627 ,  H01L27/1463

Abstract: A method of fabricating an image sensor includes providing a substrate that includes a plurality of pixel regions, forming an anti-reflection layer on the substrate, forming color filters on the anti-reflection layer, where the color filters are spaced apart from each other by openings, forming pyrolytic polymer patterns between the color filters that fill the openings, forming a capping layer on the color filters and the pyrolytic polymer patterns, and performing a thermal treatment process that removes the pyrolytic polymer patterns and forms air gap regions between the color filters.