Semiconductor device including spacer and method of manufacturing the same

    公开(公告)号:US10825819B2

    公开(公告)日:2020-11-03

    申请号:US16437620

    申请日:2019-06-11

    IPC分类号: H01L27/108 H01L29/66

    摘要: A semiconductor device includes a substrate, a first impurity implantation region and a second impurity implantation region on the substrate and spaced apart from each other, a storage node contact in contact with the first impurity implantation region, the storage node contact including an upper contact having a first width, and a lower contact having a second width that is greater than the first width at a lower portion of the upper contact, a bit line electrically connected to the second impurity implantation region and configured to cross the substrate, a bit line node contact between the bit line and the second impurity implantation region, and a spacer between the storage node contact and the bit line and between the storage node contact and the bit line node contact.

    Method of manufacturing semiconductor device including spacer

    公开(公告)号:US11282841B2

    公开(公告)日:2022-03-22

    申请号:US17037851

    申请日:2020-09-30

    IPC分类号: H01L27/108 H01L29/66

    摘要: A semiconductor device includes a substrate, a first impurity implantation region and a second impurity implantation region on the substrate and spaced apart from each other, a storage node contact in contact with the first impurity implantation region, the storage node contact including an upper contact having a first width, and a lower contact having a second width that is greater than the first width at a lower portion of the upper contact, a bit line electrically connected to the second impurity implantation region and configured to cross the substrate, a bit line node contact between the bit line and the second impurity implantation region, and a spacer between the storage node contact and the bit line and between the storage node contact and the bit line node contact.