公开(公告)号：US20210082704A1

公开(公告)日：2021-03-18

申请号：US16845959

申请日：2020-04-10

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Nohsung Kwak ,  Euijin Seo ,  Jonghwi Seo ,  Jaehee Lee ,  Ilyoung Han ,  Guesuk Lee

IPC: H01L21/268 ,  B23K26/352 ,  B23K26/066

Abstract: A semiconductor manufacturing apparatus is provided including a beam shaper arranged on a light path of a laser beam and including a plurality of mask modules. The plurality of mask modules defines a light blocking region and a light transmitting region. At least one mask module of the plurality of mask modules includes a blocking plate configured to block a portion of the laser beam, and a driver is configured to move the blocking plate.

公开(公告)号：US11462410B2

公开(公告)日：2022-10-04

申请号：US16845959

申请日：2020-04-10

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Nohsung Kwak ,  Euijin Seo ,  Jonghwi Seo ,  Jaehee Lee ,  Ilyoung Han ,  Guesuk Lee

IPC: H01L21/20 ,  H01L21/268 ,  B23K26/066 ,  B23K26/352

Abstract: A semiconductor manufacturing apparatus is provided including a beam shaper arranged on a light path of a laser beam and including a plurality of mask modules. The plurality of mask modules defines a light blocking region and a light transmitting region. At least one mask module of the plurality of mask modules includes a blocking plate configured to block a portion of the laser beam, and a driver is configured to move the blocking plate.