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公开(公告)号：US20150370246A1
公开(公告)日：2015-12-24
申请号：US14596405
申请日：2015-01-14
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Nam-Su YUK , Jae-Won JEONG , Ho-Youl LEE , Ju-No PARK , Jae-Young EOM
IPC: G05B19/418
CPC classification number: H01L21/681 , H01L21/67242 , H01L21/67259
Abstract: A substrate transporting apparatus includes a first light emitting sensor emitting a first sensing light in a first direction, a first light receiving sensor receiving the first sensing light, a second light emitting sensor emitting a second sensing light in a second direction different than the first direction, a second light receiving sensor receiving the second sensing light, a substrate transporting loader passing through traveling lines of the first sensing light and the second sensing light, a state information storage unit storing state information of the substrate transporting loader, and an operation information computing unit computing operation information of the substrate transporting loader based on the state information.
Abstract translation: 基板传送装置包括：第一发光传感器，其沿第一方向发射第一感测光，第一光接收传感器接收第一感测光;第二发光传感器，沿与第一方向不同的第二方向发射第二感测光 ，接收第二感测光的第二光接收传感器，穿过第一感测光和第二感测光的行进线的衬底传送装载器，存储衬底传送装载器的状态信息的状态信息存储单元和操作信息计算 基于状态信息的基板输送装载机的单元计算运算信息。
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2.发明申请公开(公告)号：US20130224442A1
公开(公告)日：2013-08-29
申请号：US13627782
申请日：2012-09-26
Inventor： Mi-Jeong KIM , Yeon-Sik JUNG , Woon-Ik PARK , Jae-Won JEONG
IPC: C09D5/00
CPC classification number: C09D5/00 , B81C1/00031 , B81C2201/0149 , B82Y40/00 , C09D153/00 , G03F7/0002 , H01L21/0337 , Y10T428/24612
Abstract: A nano-structured block copolymer that includes a self-assembled block copolymer disposed on a substrate, wherein the block copolymer includes a plurality of block structural units, and at least two block structural units have a solubility parameter difference of greater than or equal to about 5 megaPascal1/2.
Abstract translation: 一种纳米结构嵌段共聚物，其包括设置在基材上的自组装嵌段共聚物，其中嵌段共聚物包括多个嵌段结构单元，并且至少两个嵌段结构单元的溶解度参数差大于或等于约 5 megaPascal1 / 2。
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