公开(公告)号：US09086352B2

公开(公告)日：2015-07-21

申请号：US14094256

申请日：2013-12-02

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sang-Don Jang ,  Sang-Wook Park ,  Oui-Serg Kim ,  Hi-Kuk Lee ,  In-Bae Chang

IPC: G01B11/02 ,  G01N21/00

CPC classification number: G01N21/00 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/0106 ,  G01N2021/8461

Abstract: A stage device includes a stage configured to move in an X-axis direction and a Y-axis direction, an X-axis interference reflector spaced apart from the stage in the X-axis direction, a first X-axis interferometer disposed on the stage that is configured to measure an X-axis location of the stage using the X-axis interference reflector, and an optical movable element spaced apart from the stage in the Y-axis direction that is configured to shift in the X-axis direction a path of a light beam propagating in the Y-axis direction according to movement of the stage in the X-axis direction.

Abstract translation: 舞台装置包括被配置为在X轴方向和Y轴方向上移动的台架，与X轴方向上与舞台间隔开的X轴干涉反射镜，设置在舞台上的第一X轴干涉仪 其被配置为使用X轴干涉反射器测量所述平台的X轴位置，以及与所述载物台沿Y轴方向隔开的光学可动元件，所述光学可动元件被构造成在X轴方向上移动路径 根据载物台在X轴方向的移动而沿Y轴方向传播的光束。

公开(公告)号：US20140268171A1

公开(公告)日：2014-09-18

申请号：US14094256

申请日：2013-12-02

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sang-Don Jang ,  Sang-Wook Park ,  Oui-Serg Kim ,  Hi-Kuk Lee ,  In-Bae Chang

IPC: G01B11/14

CPC classification number: G01N21/00 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/0106 ,  G01N2021/8461

Abstract: A stage device includes a stage configured to move in an X-axis direction and a Y-axis direction, an X-axis interference reflector spaced apart from the stage in the X-axis direction, a first X-axis interferometer disposed on the stage that is configured to measure an X-axis location of the stage using the X-axis interference reflector, and an optical movable element spaced apart from the stage in the Y-axis direction that is configured to shift in the X-axis direction a path of a light beam propagating in the Y-axis direction according to movement of the stage in the X-axis direction.

Abstract translation: 舞台装置包括被配置为在X轴方向和Y轴方向上移动的台架，与X轴方向上与舞台间隔开的X轴干涉反射镜，设置在舞台上的第一X轴干涉仪 其被配置为使用X轴干涉反射器测量所述平台的X轴位置，以及与所述载物台沿Y轴方向隔开的光学可动元件，所述光学可动元件被构造成在X轴方向上移动路径 根据载物台在X轴方向的移动而沿Y轴方向传播的光束。