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公开(公告)号：US10811287B2
公开(公告)日：2020-10-20
申请号：US16128990
申请日：2018-09-12
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Hyun-Joo Jeon , Sung-Hyup Kim
IPC: H01L21/67 , B05C11/08 , H01L21/687 , B05C13/02
Abstract: A spin coater includes a rotatable chuck structure configured to hold a substrate, a bowl enclosing the substrate and guiding a flow of a fluid around the substrate to a bottom of the bowl, and a flow controller detachably coupled to the bowl such that the flow controller is arranged between the bowl and an edge of the substrate and separates the flow into a linear flow and a non-linear flow.
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