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公开(公告)号:US20220399284A1
公开(公告)日:2022-12-15
申请号:US17574212
申请日:2022-01-12
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Huichul SHIN , Hyungjin LEE , Jinhong PARK , Mingeun SONG , Euiyoung JEONG , Hiroki FUJII
IPC: H01L23/552
Abstract: A semiconductor device is provided. The semiconductor device includes: a substrate with first-conductivity-type impurities; first and second active regions provided on the substrate; a first deep element isolation layer surrounding the first active region; a second deep element isolation layer surrounding the second active region; a suction region surrounding the first and second deep element isolation layers, the suction region including the first-conductivity-type impurities; a well region provided in the substrate between the first and second active regions, the well region including second-conductivity-type impurities different from the first-conductivity-type impurities; a shallow element isolation layer provided between the suction region and the well region; and a guard structure connected to the suction region. The substrate includes a signal path portion that is provided between a top surface of the substrate and the well region, and surrounds an upper portion of the well region.