公开(公告)号：US20220280985A1

公开(公告)日：2022-09-08

申请号：US17673515

申请日：2022-02-16

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Min Soo PARK ,  Ji Hun KIM ,  Gyeong Dam BAEK ,  Min-Gu CHANG ,  Tae Hyun JO ,  Ji Yoon JUNG ,  Su Hyun KIM ,  Hyun Gyu ROH ,  Se Woong AHN ,  Goen Hui KIM ,  Hyo Joo JEOUN

IPC: B08B5/04 ,  B08B3/02

Abstract: A cleaning device for a substrate transfer device comprises a traveling unit configured to travel along a rail having first and second areas, a rail unit including the rail and a rail structure disposed on the rail, and a rinsing unit including a suction part disposed on the rail and that rotates about a suction nozzle. When the rinsing unit is placed in contact with the rail structure, the suction part rotates about the suction nozzle.